With the development of the integrated circuit industryIn the Moore era, the difficulty and cost of the performance of integrated circuit chips became higher and higher, and people urgently needed to find new technical solutions.
At present, integrated photoelectric technology represented by silicon optical technology and film lithium photon technology is a disruptive technology to respond to this bottleneck problem.Among them, lithium osteology hasThe name of optical silicon has received widespread attention in recent years. Foreign research institutions such as Harvard University have even proposed a plan to imitate the Silicon Valley model to build a new generation of lithium pyrology valley.
Recently, the research team of Shanghai Micro System and Information Technology Research Institute of the Chinese Academy of Sciences has also made breakthroughs in the field of lithium pheasantic acid integrated wafers and high -performance photon chips.Optical silicon chip.
Similar to lithium lithium, the research team and collaborators have proved to have excellent electro -light conversion characteristics in single crystal lithium film, and compared to dual refraction, transparent window range, anti -light folding, frequency combination, etc.Lithium acid is more advantageous.In addition, Silicon -based lithium pheasant heterogeneous wafers (The preparation process of LTOI) is closer to the silicon (SOI) on the insulator, so the lithium pyrium film can achieve low cost and large -scale manufacturing, which has high application value.
UseThe albumous integrated technology of universal ion knife, through the method of combining the wafer bonding of hydrogen ions, prepared high -quality silicon -based single -crystal thin film heterogeneous wafers.At the same time, the cooperative team jointly developed the micro -nanoidal machining method of ultra -low lithium lithium ticanate device, and combined with the wafer -class streamlined process to successfully prepare lithium lithium photon chip.
Lithium lithium photon chip not only shows the comparable electric light modulation efficiency as the lithium lithium -lithium film, but also based on lithium lithium lithium photon chip. The research team is for the first timeThe X -cut electro -optic platform has successfully produced the optocoic optical frequency comb, combined with its electro -optic adjustment properties, and is expected to be applied in the aspects of laser radar and precision measurement.
It is worth mentioning that the current research team has been in chargeThe 8 -inch wafer preparation technology has laid the core material foundation for the development of larger domestic optoelectronic integrated chips and mobile terminal radio frequency filter chips.
The characteristics of extremely low optical loss, high -efficiency electro -light conversion, and lonely frequency combination of lithium photon chip are expected to provide solutions for the four bottleneck problems of the speed, power consumption, frequency and bandwidth bandwidth in the field of communication, andLight computing, optical communication and other fields have spawned revolutionary technologies.
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